منابع مشابه
The Development of a Long-Stroke Precision Positioning Stage for Micro Fabrication by Two-Photon Polymerization
This paper applies a combined precision stage to fabricate micro-structures by two-photon polymerization (TPP). The combined stage consists of PZT and stepper-motor stages to achieve precision positioning in long displacements. First, we derive the models of the stages by identification experiments. Second, we apply robust loop-shaping techniques to improve the positioning performance of the st...
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ژورنال
عنوان ژورنال: Kobunshi
سال: 1966
ISSN: 0454-1138,2185-9825
DOI: 10.1295/kobunshi.15.41